The Growth and Characteristics of Diamond Grown by Microwave Plasma-Assisted CVD

Low Temperature Plasma CVD Grown Graphene by Microwave Surface-Wave Plasma CVD Using Camphor Precursor

Hydrocarbon precursor such as methane has been widely used to grow graphene films and the methods of growing quality graphene films are dominated by thermal CVD (chemical vapor deposition) system. Graphene films grown by plasma process are generally highly defective which in turns degrade the quality of the films. Here, using a green precursor, camphor we demonstrate a simple and economical met...

Novel Diamond Films Synthesis Strategy: Methanol and Argon Atmosphere by Microwave Plasma CVD Method Without Hydrogen

Diamond thin films are grown on silicon substrates by only using methanol and argon mixtures in microwave plasma chemical vapor deposition (MPCVD) reactor. It is worth mentioning that the novel strategy makes the synthesis reaction works smoothly without hydrogen atmosphere, and the substrates temperature is only 500 °C. The evidence of surface morphology and thickness under different time is o...

Microwave Plasma Assisted Chemical Vapor Deposition of Diamond

Diamond crystal S and p01 ycrystal l i ne diamond fi lms have been depos i e y t h e microwave plasma ass i s t ed C V D method from C H / H mixtures. The i n: :oncentration of methane, the pressure, the temperatu$e, 'the to ta l flow ra t e and the microwave power were varied in large ranges. The morphology of the deposits were s tudied by op t i ca l and scanning e l ec t ron microscopy and t...

A plasma discharge model of a microwave plasma diamond CVD reactor

A self-consistent electromagnetic eld model and a uid plasma model have been developed for a microwave plasma reactor used for diamond chemical vapor deposition. The coupled numerical models simulate the electromagnetic excitation of the hydrogen discharge and the hydrogen plasma discharge characteristics. The time-varying electric and magnetic elds inside the reactor, both inside and outside t...

Preferential Biofunctionalization of Carbon Nanotubes Grown by Microwave Plasma-Enhanced CVD